Computation of Capacitance for MEMS Comb-Drive Structures

According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on corner capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on corner capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects.