利用部分补偿透镜进行非球面面形测量
Testing an Aspheric Surface Using Part-Compensating Lens
-
摘要: 提出用部分补偿透镜进行非球面检验的方法.对部分补偿透镜的设计方法和要求进行了研究,针对3种不同参数的非球面设计了部分补偿透镜,结构比零补偿器更简单.分析了各种部分补偿透镜的非球面度补偿范围,证明用简单且易于制造的部分补偿透镜补偿不同相对孔径和非球面度的非球面.测量精度可达到λ/10.Abstract: A novel aspheric surface testing method using part-compensating lens is presented. Specific design requirements and design methods of part-compensating lens are given. The design requirements are applied in the optimization design of the part-compensating lens to three kinds of aspheric surfaces, and it is proved that the structure of part-compensating lens is much simpler than that of null compensator. Analysis is made about the asphericity compensation range of each part-compensating lens. The results demonstrate that aspheric surfaces with different relative aperture and asphericity can be compensated by part-compensating lens which is simple and easily fabricated. The measurement precision can reach λ/10.
下载: