Active Frequency Control and Orthogonal Compensation for Temperature-Drift Suppression in MEMS Ring Gyroscopes

TY - JOUR

T1 - Active Frequency Control and Orthogonal Compensation for Temperature-Drift Suppression in MEMS Ring Gyroscopes

AU - Cui, Ke

AU - Sheng, Ke

AU - Hu, Xinyu

AU - An, Daren

AU - Wang, Xiaolei

AU - Ding, Xukai

AU - Shen, Chong

AU - Yang, Yunchun

AU - Cao, Huiliang

AU - Xie, Huikai

N1 - Publisher Copyright: © 1963-2012 IEEE.

PY - 2026

Y1 - 2026

N2 - This article presents a dual-mode active frequency control (DM-AFC) technique utilizing dynamic stiffness compensation to address temperature-induced zero-bias drift and scale factor instability in micro-electromechanical system (MEMS) ring gyroscopes. Unlike conventional temperature compensation methods that often add system complexity, the proposed approach enables real-time quadrature error estimation and compensation, significantly suppressing thermal drift via demodulation phase correction. Simultaneously, the operating frequency is accurately stabilized through electrostatic stiffness tuning, decoupling the scale factor from temperature variations. Additionally, mechanical sensitivity is enhanced by reducing the frequency split between drive and sense modes, yielding a 4.3-fold increase in sensitivity and a 12.6-dB improvement in signal-to-noise ratio (SNR). The demodulation phase error was reduced from 0.0518° to 0.00188°, leading to a 37-fold reduction in temperature-drift coefficient. Experimental results demonstrate a scale factor nonlinearity of only 0.00542% over - 40 °C to 80°C—a 96.86% improvement—and a bias instability of 0.3755°/h. The method provides a strong temperature robustness solution for navigation-grade MEMS gyroscopes, without imposing significant system overhead.

AB - This article presents a dual-mode active frequency control (DM-AFC) technique utilizing dynamic stiffness compensation to address temperature-induced zero-bias drift and scale factor instability in micro-electromechanical system (MEMS) ring gyroscopes. Unlike conventional temperature compensation methods that often add system complexity, the proposed approach enables real-time quadrature error estimation and compensation, significantly suppressing thermal drift via demodulation phase correction. Simultaneously, the operating frequency is accurately stabilized through electrostatic stiffness tuning, decoupling the scale factor from temperature variations. Additionally, mechanical sensitivity is enhanced by reducing the frequency split between drive and sense modes, yielding a 4.3-fold increase in sensitivity and a 12.6-dB improvement in signal-to-noise ratio (SNR). The demodulation phase error was reduced from 0.0518° to 0.00188°, leading to a 37-fold reduction in temperature-drift coefficient. Experimental results demonstrate a scale factor nonlinearity of only 0.00542% over - 40 °C to 80°C—a 96.86% improvement—and a bias instability of 0.3755°/h. The method provides a strong temperature robustness solution for navigation-grade MEMS gyroscopes, without imposing significant system overhead.

KW - Active frequency control (AFC)

KW - circular gyroscope

KW - scale factor temperature stability

KW - temperature drift

UR - https://www.scopus.com/pages/publications/105028301148

U2 - 10.1109/TIM.2026.3654731

DO - 10.1109/TIM.2026.3654731

M3 - Article

AN - SCOPUS:105028301148

SN - 0018-9456

VL - 75

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

M1 - 9504909

ER -