@article{4f43676bcb1b4f5b9e3acc3a531584df,
title = "Customizable sub-nanometer vertical-step grayscale lithography",
author = "Haonan Ma and Shijie Zhao and Xia Liu and Ziying Hu and Xu Han and Hongtao Li and Zeming Jin and Mingdi Zhang and Jixiang Li and Wenke Fu and Yunyun Dai and Yuan Huang and Yeliang Wang",
year = "2026",
month = mar,
day = "30",
doi = "10.1016/j.scib.2026.01.044",
language = "English",
volume = "71",
pages = "1273--1277",
journal = "Science Bulletin",
issn = "2095-9273",
publisher = "Elsevier B.V.",
number = "6",
}