A Fast-Response, No-Overshoot Gas Mass Flow Controller Based on an Optimized MEMS Piezoresistive Differential Pressure Sensor

Houbo Ding; Xiaochuan Ming; Yue Tang; Zhiguo Zhang; Huikai Xie; Shuai Ren; Xiaoyi Wang

doi:10.1109/TIM.2025.3627345

A Fast-Response, No-Overshoot Gas Mass Flow Controller Based on an Optimized MEMS Piezoresistive Differential Pressure Sensor

Houbo Ding
, Xiaochuan Ming
, Yue Tang
, Zhiguo Zhang
, Huikai Xie
, Shuai Ren^*
, Xiaoyi Wang^*

^*此作品的通讯作者

Beijing Institute of Technology
Shenyang Academy of Instrumentation Science

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

This study reports the design and implementation of a high-sensitivity MEMS-based differential pressure sensor, engineered for integration into high-performance gas mass flow controllers (MFCs). The sensor adopts an optimized structural configuration that strategically concentrates mechanical stress in the piezoresistive regions, thereby enhancing its sensitivity. Operating over a pressure range of 0–30 kPa, the sensor achieves a sensitivity of 3.04 mV/V/kPa, exceeding the performance of conventional piezoresistive sensors within the same range. Building upon this sensor, an MFC prototype was developed incorporating a refined orifice structure to ensure stable and precise flow regulation across a control range of 0–100 standard liters per minute (SLM). To address control accuracy and dynamic response, an active disturbance rejection control (ADRC) algorithm was implemented, effectively eliminating overshoot during transient operations. The results achieve a full-scale control accuracy of ±0.45% F.S. and a rapid response time of 90 ms, outperforming comparable commercial MFCs, demonstrating the strong potential of MEMS-based pressure sensing technology for use in high-precision flow control systems.

源语言	英语
期刊论文编号	9540010
期刊	IEEE Transactions on Instrumentation and Measurement
卷	74
DOI	https://doi.org/10.1109/TIM.2025.3627345
出版状态	已出版 - 2025

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title = "A Fast-Response, No-Overshoot Gas Mass Flow Controller Based on an Optimized MEMS Piezoresistive Differential Pressure Sensor",

abstract = "This study reports the design and implementation of a high-sensitivity MEMS-based differential pressure sensor, engineered for integration into high-performance gas mass flow controllers (MFCs). The sensor adopts an optimized structural configuration that strategically concentrates mechanical stress in the piezoresistive regions, thereby enhancing its sensitivity. Operating over a pressure range of 0{\textendash}30 kPa, the sensor achieves a sensitivity of 3.04 mV/V/kPa, exceeding the performance of conventional piezoresistive sensors within the same range. Building upon this sensor, an MFC prototype was developed incorporating a refined orifice structure to ensure stable and precise flow regulation across a control range of 0{\textendash}100 standard liters per minute (SLM). To address control accuracy and dynamic response, an active disturbance rejection control (ADRC) algorithm was implemented, effectively eliminating overshoot during transient operations. The results achieve a full-scale control accuracy of ±0.45\% F.S. and a rapid response time of 90 ms, outperforming comparable commercial MFCs, demonstrating the strong potential of MEMS-based pressure sensing technology for use in high-precision flow control systems.",

keywords = "Dynamic response, MEMS pressure sensor, high accuracy, high sensitivity, mass flow controller (MFC)",

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AU - Ding, Houbo

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AU - Tang, Yue

AU - Zhang, Zhiguo

AU - Xie, Huikai

AU - Ren, Shuai

AU - Wang, Xiaoyi

PY - 2025

Y1 - 2025

N2 - This study reports the design and implementation of a high-sensitivity MEMS-based differential pressure sensor, engineered for integration into high-performance gas mass flow controllers (MFCs). The sensor adopts an optimized structural configuration that strategically concentrates mechanical stress in the piezoresistive regions, thereby enhancing its sensitivity. Operating over a pressure range of 0–30 kPa, the sensor achieves a sensitivity of 3.04 mV/V/kPa, exceeding the performance of conventional piezoresistive sensors within the same range. Building upon this sensor, an MFC prototype was developed incorporating a refined orifice structure to ensure stable and precise flow regulation across a control range of 0–100 standard liters per minute (SLM). To address control accuracy and dynamic response, an active disturbance rejection control (ADRC) algorithm was implemented, effectively eliminating overshoot during transient operations. The results achieve a full-scale control accuracy of ±0.45% F.S. and a rapid response time of 90 ms, outperforming comparable commercial MFCs, demonstrating the strong potential of MEMS-based pressure sensing technology for use in high-precision flow control systems.

AB - This study reports the design and implementation of a high-sensitivity MEMS-based differential pressure sensor, engineered for integration into high-performance gas mass flow controllers (MFCs). The sensor adopts an optimized structural configuration that strategically concentrates mechanical stress in the piezoresistive regions, thereby enhancing its sensitivity. Operating over a pressure range of 0–30 kPa, the sensor achieves a sensitivity of 3.04 mV/V/kPa, exceeding the performance of conventional piezoresistive sensors within the same range. Building upon this sensor, an MFC prototype was developed incorporating a refined orifice structure to ensure stable and precise flow regulation across a control range of 0–100 standard liters per minute (SLM). To address control accuracy and dynamic response, an active disturbance rejection control (ADRC) algorithm was implemented, effectively eliminating overshoot during transient operations. The results achieve a full-scale control accuracy of ±0.45% F.S. and a rapid response time of 90 ms, outperforming comparable commercial MFCs, demonstrating the strong potential of MEMS-based pressure sensing technology for use in high-precision flow control systems.

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A Fast-Response, No-Overshoot Gas Mass Flow Controller Based on an Optimized MEMS Piezoresistive Differential Pressure Sensor

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