TY - JOUR
T1 - A High-Fill-Factor Piezoelectric MEMS Mirror Based on Bow-Shaped Unimorph AlN Actuators
AU - Chen, Hao
AU - Ding, Xinyu
AU - Jiao, Wenlong
AU - Liu, Qiangqiang
AU - Cao, Ke
AU - Mao, Xiaodan
AU - Jiang, Senlin
AU - Tang, Yue
AU - Wu, Tao
AU - Wang, Xiaoyi
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026/4/1
Y1 - 2026/4/1
N2 - Piezoelectric MEMS micromirrors for light modulation and optical beam steering have been drawing extensive attention recently, but their applications are still limited due to low fill factor and low resonant frequency, especially when the well-established piezoelectric material-AlN is employed. This study proposes a bowshaped unimorph piezoelectric actuator that can generate multidegree-of-freedom motion with high fill factor. Particularly, a tip-tilt-piston (TTP) piezoelectric micromirror made of such actuators is designed, fabricated, and characterized. The fill factor is as large as 73% with a mirror plate size of 1:0 × 1:0 mm. The measured resonant frequencies for the piston, tip, and tilt modes are 0.890, 1.747, and 1.781 kHz, respectively. The measured maximum piston stroke and tip or tilt angle reach 3:3 μm and 14.4 mrad with high linearity under 24 Vpp. This bow-shaped actuator design provides a new direction for enhancing piezoelectric actuation efficiency and capability.
AB - Piezoelectric MEMS micromirrors for light modulation and optical beam steering have been drawing extensive attention recently, but their applications are still limited due to low fill factor and low resonant frequency, especially when the well-established piezoelectric material-AlN is employed. This study proposes a bowshaped unimorph piezoelectric actuator that can generate multidegree-of-freedom motion with high fill factor. Particularly, a tip-tilt-piston (TTP) piezoelectric micromirror made of such actuators is designed, fabricated, and characterized. The fill factor is as large as 73% with a mirror plate size of 1:0 × 1:0 mm. The measured resonant frequencies for the piston, tip, and tilt modes are 0.890, 1.747, and 1.781 kHz, respectively. The measured maximum piston stroke and tip or tilt angle reach 3:3 μm and 14.4 mrad with high linearity under 24 Vpp. This bow-shaped actuator design provides a new direction for enhancing piezoelectric actuation efficiency and capability.
KW - AlN
KW - MEMS mirror
KW - high fill factor
KW - piezoelectric actuation
KW - tip-tilt-piston (TTP)
UR - https://www.scopus.com/pages/publications/105033061937
U2 - 10.1109/TED.2026.3661959
DO - 10.1109/TED.2026.3661959
M3 - Article
AN - SCOPUS:105033061937
SN - 0018-9383
VL - 73
SP - 2161
EP - 2167
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 4
ER -