A₂-Mode Lamb Passive-Wireless Surface-Acoustic-Wave Micro-Pressure Sensor Based on Cantilever Beam Structure

TY - JOUR

T1 - A2-Mode Lamb Passive-Wireless Surface-Acoustic-Wave Micro-Pressure Sensor Based on Cantilever Beam Structure

AU - Duan, Zhuoyue

AU - Wang, Tao

AU - Ji, Wei

AU - Feng, Lihui

AU - Yin, Peng

AU - Lu, Jihua

AU - Yin, Litong

N1 - Publisher Copyright: © 2025 by the authors.

PY - 2025/3

Y1 - 2025/3

N2 - Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. This article proposes a a method of using an (Formula presented.) -mode Lamb SAW sensor and introduces an inertial structure in the form of a cantilever beam to enhance sensitivity. An MEMS-compatible manufacturing process was employed to create a multi-layer structure of (Formula presented.), (Formula presented.), and (Formula presented.) for the SAW micro-pressure sensor. To investigate the operational performance of the SAW micro-pressure sensor, a micro-pressure testing system was established. The experimental results demonstrate that the sensor exhibits high sensitivity to micro-pressure, validating the effectiveness of the proposed design.

AB - Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. This article proposes a a method of using an (Formula presented.) -mode Lamb SAW sensor and introduces an inertial structure in the form of a cantilever beam to enhance sensitivity. An MEMS-compatible manufacturing process was employed to create a multi-layer structure of (Formula presented.), (Formula presented.), and (Formula presented.) for the SAW micro-pressure sensor. To investigate the operational performance of the SAW micro-pressure sensor, a micro-pressure testing system was established. The experimental results demonstrate that the sensor exhibits high sensitivity to micro-pressure, validating the effectiveness of the proposed design.

KW - MEMS-compatible manufacturing process

KW - SAW micro-pressure sensor

KW - cantilever beam

KW - passive wireless

UR - https://www.scopus.com/pages/publications/105000885103

U2 - 10.3390/s25061873

DO - 10.3390/s25061873

M3 - Article

AN - SCOPUS:105000885103

SN - 1424-8220

VL - 25

JO - Sensors

JF - Sensors

IS - 6

M1 - 1873

ER -