TY - JOUR
T1 - High-Fidelity Micro-Pattern Printing Based on Non-Uniform Sampling Holographic Femtosecond Laser
AU - Li, Taoyong
AU - Wang, Andong
AU - Li, Min
AU - Zhang, Leyi
AU - Yi, Peng
AU - Li, Xibiao
AU - Wang, Guocui
AU - Huang, Lingling
AU - Zhang, Xiangyu
AU - Li, Xiaowei
N1 - Publisher Copyright:
© 2025 Wiley-VCH GmbH.
PY - 2026/1/9
Y1 - 2026/1/9
N2 - Holographic femtosecond laser printing has been widely used for the fabrication of micro-patterned structures owing to its high efficiency and flexibility. However, conventional pixel-based patterns rely on high-density uniform sampling, which imposes limits on pattern fidelity and computational efficiency. In this work, a high-fidelity micro-pattern printing method is proposed based on a non-uniform sampling holographic femtosecond laser. Precise control of pattern contours is achieved at a low global sampling number by performing local non-uniform sampling, which is enabled by replacing the Fast Fourier Transform with a non-uniform matrix triple product formulation for diffraction calculation. In addition, an adaptive holographic field modulation strategy is established, where amplitude-weight compensation is introduced to address the diffraction imbalance arising from differences in sampling point area. Based on the method, vector-defined patterns generated from functional expressions and engineering drawings are fabricated with high fidelity. For a representative “B” pattern, the computational efficiency improves by ≈9.4 times compared with the uniform-sampling method, and the edge roughness is reduced from 330 to 120 nm. Finally, a millimeter-scale Fresnel zone plate is fabricated by splicing multiple non-uniform sampling holographic patterns, demonstrating the potential of the method for precision optical device manufacturing.
AB - Holographic femtosecond laser printing has been widely used for the fabrication of micro-patterned structures owing to its high efficiency and flexibility. However, conventional pixel-based patterns rely on high-density uniform sampling, which imposes limits on pattern fidelity and computational efficiency. In this work, a high-fidelity micro-pattern printing method is proposed based on a non-uniform sampling holographic femtosecond laser. Precise control of pattern contours is achieved at a low global sampling number by performing local non-uniform sampling, which is enabled by replacing the Fast Fourier Transform with a non-uniform matrix triple product formulation for diffraction calculation. In addition, an adaptive holographic field modulation strategy is established, where amplitude-weight compensation is introduced to address the diffraction imbalance arising from differences in sampling point area. Based on the method, vector-defined patterns generated from functional expressions and engineering drawings are fabricated with high fidelity. For a representative “B” pattern, the computational efficiency improves by ≈9.4 times compared with the uniform-sampling method, and the edge roughness is reduced from 330 to 120 nm. Finally, a millimeter-scale Fresnel zone plate is fabricated by splicing multiple non-uniform sampling holographic patterns, demonstrating the potential of the method for precision optical device manufacturing.
KW - femtosecond laser printing
KW - non-uniform sampling
KW - phase holographic spatial shaping
UR - https://www.scopus.com/pages/publications/105022158369
U2 - 10.1002/adom.202502705
DO - 10.1002/adom.202502705
M3 - Article
AN - SCOPUS:105022158369
SN - 2195-1071
VL - 14
JO - Advanced Optical Materials
JF - Advanced Optical Materials
IS - 1
M1 - e02705
ER -