High-precision large-aperture single-frame interferometric surface profile measurement method based on deep learning

TY - JOUR

T1 - High-precision large-aperture single-frame interferometric surface profile measurement method based on deep learning

AU - Tang, Liang

AU - Han, Mingzhi

AU - Yang, Shuai

AU - Sun, Ye

AU - Qiu, Lirong

AU - Zhao, Weiqian

N1 - Publisher Copyright: © 2025 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT.

PY - 2025/10/1

Y1 - 2025/10/1

N2 - Highlights This is the first time that high-precision measurement of large-aperture optical components has been realized by capturing single-frame interferograms without requiring a phase shifter. We integrate deep learning algorithms with interferometry methods to simulate the interferometric process in a deep learning framework. This approach mitigates environmental noise effects on measurement accuracy, eliminates phase shifters, and enables dynamic surface profile measurements of large-aperture optical components. Compared with traditional phase-shifting methods, this approach achieves a 48-fold time reduction while improving measurement efficiency and stability. We demonstrate a highly efficient dynamic measurement method that achieves comparable accuracy without ZYGO interferometers’ ultra-stable environment requirements.

AB - Highlights This is the first time that high-precision measurement of large-aperture optical components has been realized by capturing single-frame interferograms without requiring a phase shifter. We integrate deep learning algorithms with interferometry methods to simulate the interferometric process in a deep learning framework. This approach mitigates environmental noise effects on measurement accuracy, eliminates phase shifters, and enables dynamic surface profile measurements of large-aperture optical components. Compared with traditional phase-shifting methods, this approach achieves a 48-fold time reduction while improving measurement efficiency and stability. We demonstrate a highly efficient dynamic measurement method that achieves comparable accuracy without ZYGO interferometers’ ultra-stable environment requirements.

KW - deep learning

KW - dynamic high-precision measurement

KW - large-aperture optical components

KW - single-frame interferometric

KW - surface profile

UR - https://www.scopus.com/pages/publications/105005144397

U2 - 10.1088/2631-7990/add197

DO - 10.1088/2631-7990/add197

M3 - Article

AN - SCOPUS:105005144397

SN - 2631-8644

VL - 7

JO - International Journal of Extreme Manufacturing

JF - International Journal of Extreme Manufacturing

IS - 5

M1 - 055601

ER -