Microstructure Optimization of Flexible Sensors for Enhanced Performance: A Finite Element Analysis

TY - JOUR

T1 - Microstructure Optimization of Flexible Sensors for Enhanced Performance

T2 - 27th Annual Conference and 16th International Conference of Chinese Society of Micro-Nano Technology, CSMNT 2025

AU - Zhao, Lu Yu

AU - Wu, Yi Wen

AU - Zhang, Zhao Jie

AU - Yi-Zhang,

AU - Jian-Yuan,

AU - Zhang, Lu Lu

AU - Li, Yu Tao

AU - Wang, Yeliang

N1 - Publisher Copyright: © 2026 Institute of Physics Publishing. All rights reserved.

PY - 2026

Y1 - 2026

N2 - Flexible pressure sensors are crucial for fields such as wearable devices and human-computer interaction. Nanomaterials such as carbon nanotubes are often used as sensing layers. Introducing microstructures on the sensor surface can further improve performance, but this usually leads to nonlinear response. This study employed the Finite Element Analysis (FEA) method to investigate two typical microstructures (cuboid and pyramid). The results show that adjusting the spacing and aspect ratio of the microstructure can affect the sensitivity, but has a limited effect on the linearity. To overcome this limitation, this paper proposes an optimized design scheme that combines elastomers with different Young's moduli through a stacking and nesting strategy. These designs achieve high linearity (R2 = 0.99) while maintaining sensitivity variations within 5%, providing a practical pathway for developing nanomaterial-based flexible sensors with balanced sensitivity and linearity.

AB - Flexible pressure sensors are crucial for fields such as wearable devices and human-computer interaction. Nanomaterials such as carbon nanotubes are often used as sensing layers. Introducing microstructures on the sensor surface can further improve performance, but this usually leads to nonlinear response. This study employed the Finite Element Analysis (FEA) method to investigate two typical microstructures (cuboid and pyramid). The results show that adjusting the spacing and aspect ratio of the microstructure can affect the sensitivity, but has a limited effect on the linearity. To overcome this limitation, this paper proposes an optimized design scheme that combines elastomers with different Young's moduli through a stacking and nesting strategy. These designs achieve high linearity (R2 = 0.99) while maintaining sensitivity variations within 5%, providing a practical pathway for developing nanomaterial-based flexible sensors with balanced sensitivity and linearity.

UR - https://www.scopus.com/pages/publications/105035141322

U2 - 10.1088/1742-6596/3184/1/012033

DO - 10.1088/1742-6596/3184/1/012033

M3 - Conference article

AN - SCOPUS:105035141322

SN - 1742-6588

VL - 3184

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012033

Y2 - 21 November 2025 through 24 November 2025

ER -