@inproceedings{90f94565022b4c60a78244fc33878aff,
title = "Monitoring energy-dependent ultrafast laser manufacturing inside gallium arsenide by fluorescence imaging",
abstract = "Ultrafast laser processing inside semiconductor materials faces the challenge of energy nonlinear transmission saturation, and it is difficult to observe the behavior of low-density plasma outside the focus region by traditional pump-detection technology. In this study, laser-induced plasma fluorescence imaging technology is used to visualize the low-density plasma in the pre-focal region of gallium arsenide (GaAs). By analyzing the relationship between fluorescence distribution and laser energy, the influence mechanism of incident energy on the actual energy flow at the focal point is revealed, and the simulation results further verify the process. This work provides a new way for quantitative evaluation of laser energy transfer in semiconductor materials.",
keywords = "Micro/nano fabrication, fluorescence imaging, low-density plasma, ultrafast laser",
author = "Zhi Wang and Weiyu Zhu and Sicheng Zhu and Xiaoyu Zhang and Tianqi Wang and Andong Wang and Xiaowei Li",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 11th International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2025 ; Conference date: 20-07-2025 Through 22-07-2025",
year = "2026",
month = jan,
day = "13",
doi = "10.1117/12.3089496",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xiangang Luo and Costas Fotakis and Koji Sugioka and Jinghua Teng",
booktitle = "11th International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2025",
address = "United States",
}