Time-Stretched Optical Frequency Comb Dispersive Fourier Transformation for Rapid Measurement of 3-D Morphology of Solar Cells

Li Chen; Zhehai Zhou; Guangwei Chen; Tengfei Wu; Zhendong Zhu; Ying Qin; Yue Zhao; Jibo Han; Yu Bai; Zhiyong Zhang; Xiang Zhang

doi:10.1109/TIM.2026.3664518

Time-Stretched Optical Frequency Comb Dispersive Fourier Transformation for Rapid Measurement of 3-D Morphology of Solar Cells

Li Chen
, Zhehai Zhou^*
, Guangwei Chen
, Tengfei Wu^*
, Zhendong Zhu^*
, Ying Qin
, Yue Zhao
, Jibo Han
, Yu Bai
, Zhiyong Zhang
, Xiang Zhang

^*此作品的通讯作者

Beijing Information Science & Technology University
China Aviation Industry Corporation
Peking University

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Accurate measurement and quality inspection of solar cell morphology are essential for ensuring high fabrication yield and device performance. Conventional techniques for online inspection are restricted by slow acquisition speed, limited resolution, or complex implementation, and thus cannot fully satisfy the demands of high-throughput manufacturing. To overcome these limitations, we propose a spectral interference measurement method based on an optical frequency comb (OFC) combined with time-stretched dispersive Fourier transform (TS-DFT), enabling real-time, continuous, and high-speed analysis. Theoretical analysis indicates that the minimum detection time per frame can reach 4 ns owing to the repetition rate of the OFC, whereas the practical acquisition speed in the current implementation is limited to the millisecond scale due to hardware constraints. Experimental results demonstrate a spectral resolution of 0.39 nm and high accuracy with root-mean-squared errors (RMSEs) of 0.543 μm (locked OFC) and 0.732 μm (unlocked OFC). These results confirm the capability of the proposed system for precise online inspection and its potential in 3-D precision manufacturing.

源语言	英语
文章编号	1001414
期刊	IEEE Transactions on Instrumentation and Measurement
卷	75
DOI	https://doi.org/10.1109/TIM.2026.3664518
出版状态	已出版 - 2026
已对外发布	是

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title = "Time-Stretched Optical Frequency Comb Dispersive Fourier Transformation for Rapid Measurement of 3-D Morphology of Solar Cells",

abstract = "Accurate measurement and quality inspection of solar cell morphology are essential for ensuring high fabrication yield and device performance. Conventional techniques for online inspection are restricted by slow acquisition speed, limited resolution, or complex implementation, and thus cannot fully satisfy the demands of high-throughput manufacturing. To overcome these limitations, we propose a spectral interference measurement method based on an optical frequency comb (OFC) combined with time-stretched dispersive Fourier transform (TS-DFT), enabling real-time, continuous, and high-speed analysis. Theoretical analysis indicates that the minimum detection time per frame can reach 4 ns owing to the repetition rate of the OFC, whereas the practical acquisition speed in the current implementation is limited to the millisecond scale due to hardware constraints. Experimental results demonstrate a spectral resolution of 0.39 nm and high accuracy with root-mean-squared errors (RMSEs) of 0.543 μm (locked OFC) and 0.732 μm (unlocked OFC). These results confirm the capability of the proposed system for precise online inspection and its potential in 3-D precision manufacturing.",

keywords = "3-D morphology, dispersive Fourier transformation (DFT), optical frequency comb (OFC)",

author = "Li Chen and Zhehai Zhou and Guangwei Chen and Tengfei Wu and Zhendong Zhu and Ying Qin and Yue Zhao and Jibo Han and Yu Bai and Zhiyong Zhang and Xiang Zhang",

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year = "2026",

doi = "10.1109/TIM.2026.3664518",

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AU - Chen, Li

AU - Zhou, Zhehai

AU - Chen, Guangwei

AU - Wu, Tengfei

AU - Zhu, Zhendong

AU - Qin, Ying

AU - Zhao, Yue

AU - Han, Jibo

AU - Bai, Yu

AU - Zhang, Zhiyong

AU - Zhang, Xiang

PY - 2026

Y1 - 2026

N2 - Accurate measurement and quality inspection of solar cell morphology are essential for ensuring high fabrication yield and device performance. Conventional techniques for online inspection are restricted by slow acquisition speed, limited resolution, or complex implementation, and thus cannot fully satisfy the demands of high-throughput manufacturing. To overcome these limitations, we propose a spectral interference measurement method based on an optical frequency comb (OFC) combined with time-stretched dispersive Fourier transform (TS-DFT), enabling real-time, continuous, and high-speed analysis. Theoretical analysis indicates that the minimum detection time per frame can reach 4 ns owing to the repetition rate of the OFC, whereas the practical acquisition speed in the current implementation is limited to the millisecond scale due to hardware constraints. Experimental results demonstrate a spectral resolution of 0.39 nm and high accuracy with root-mean-squared errors (RMSEs) of 0.543 μm (locked OFC) and 0.732 μm (unlocked OFC). These results confirm the capability of the proposed system for precise online inspection and its potential in 3-D precision manufacturing.

AB - Accurate measurement and quality inspection of solar cell morphology are essential for ensuring high fabrication yield and device performance. Conventional techniques for online inspection are restricted by slow acquisition speed, limited resolution, or complex implementation, and thus cannot fully satisfy the demands of high-throughput manufacturing. To overcome these limitations, we propose a spectral interference measurement method based on an optical frequency comb (OFC) combined with time-stretched dispersive Fourier transform (TS-DFT), enabling real-time, continuous, and high-speed analysis. Theoretical analysis indicates that the minimum detection time per frame can reach 4 ns owing to the repetition rate of the OFC, whereas the practical acquisition speed in the current implementation is limited to the millisecond scale due to hardware constraints. Experimental results demonstrate a spectral resolution of 0.39 nm and high accuracy with root-mean-squared errors (RMSEs) of 0.543 μm (locked OFC) and 0.732 μm (unlocked OFC). These results confirm the capability of the proposed system for precise online inspection and its potential in 3-D precision manufacturing.

KW - 3-D morphology

KW - dispersive Fourier transformation (DFT)

KW - optical frequency comb (OFC)

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DO - 10.1109/TIM.2026.3664518

M3 - Article

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SN - 0018-9456

VL - 75

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

M1 - 1001414

ER -

Time-Stretched Optical Frequency Comb Dispersive Fourier Transformation for Rapid Measurement of 3-D Morphology of Solar Cells

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